15kW HIPIMS High-Power Impulse Magnetron Sputtering Power Source

Power supply model

HIPIMS400A

Three phase input parameters

Three phase input voltage: AC380V ± 5%, 50Hz

Three phase input current: 40A

Three phase input air switch: three position 63A

HiPIMS negative pulse output parameters

Output power

15kW

Working mode

Constant voltage, constant current, constant power

Working voltage

200V-1000V

Pulse current

80A-400A

Peak power

400kW

Working frequency

100Hz -1500Hz

Working pulse width

10us -400us

Constant voltage mode

200V-1000V adjustable, 5V per step, with limited current

Constant current mode

1-20A adjustable, 0.5A per step, voltage adjustable

Constant power mode

200W-15kW adjustable, 60W per step, voltage and current can be limited

HiPIMS composite power supply parameters (DC magnetron sputtering)

Output power

10kW

Working mode

Constant current, constant power

Working voltage

50V-750V

Working current

1A-20A

Constant current mode

1A-20A adjustable, 0.5A per step, voltage adjustable

Constant power mode

200W-10kW adjustable, 40W per step, voltage and current can be limited

Other parameters

Overall dimensions

225mm x 490mm x 850mm(HWL)

Control method

Touch screen control+RS485 Modbus communication

Protection

Pulse voltage and current grading protection control

Cooling method

Air cooling

Functions

This power supply has a multi waveform programmable function, where users can program the amplitude, width, delay, number of pulses, etc. of the output waveform. This function allows users to optimize and explore different materials, plasma discharge, etc., in order to obtain superior coating;

This power supply can output DC separately, Pulse pulse separately, or DC combined with Pulse pulse jointly;

The panel of this power supply is equipped with a small waveform display screen, which can display the  voltage and current waveform in real-time;

The panel of this power supply is equipped with a BNC connector, which can be connected to an external oscilloscope for real-time monitoring of working voltage and current;