High-Power Linear Ion Source Power Supply for Precision Surface Treatment
Upgrade your thin-film deposition and surface cleaning processes with this 3000W anode layer ion source power supply engineered for superior performance, repeatability, and arc control. Ideal for R&D and industrial production environments.
Features
- DSP+FPGA Digital Control – Real-time dynamic tracking with OLED display for instant monitoring of power supply and cathode status.
- High Output Accuracy – ≤1% deviation from setpoint, ensuring excellent process repeatability and uniform film layers.
- Intelligent Arc Management – Arc detection <0.1 µs, suppression up to 20,000 arcs/s, and arc energy <0.2 mJ/kW – minimizes substrate damage.
- Versatile Working Modes – Constant voltage (default constant power), adjustable duty cycle (15–90%), and square wave output (40–80 kHz).
- Robust Communication – Standard analog (DB25, 0–10VDC) and RS-485 (Modbus-RTU), with optional Profibus (DB9). Interlock safety included.
- Compact & Reliable – 2U 19″ rack-mount, fan-cooled, 12 kg net weight, operates at +5 to +45°C.
Technical Specifications
| Parameter | Value |
|---|---|
| Power Rating | 3000 W |
| Input Voltage & Frequency | 220VAC ±10% + PE, 50–60 Hz |
| Output Current (Max) | 1000 mA |
| Output Voltage (Max) | 2500 V |
| Output Frequency | 40–80 kHz |
| Duty Cycle | 15–90% (default 50%) |
| Output Waveform | Square wave |
| Arc Detection Time | <0.1 µs |
| Arc Suppression Capability | 20,000 arcs/s |
| Arc Energy | <0.2 mJ/kW |
| Display | 3.1″ OLED (resolution: 1V / 1mA / 1W) |
| Output Accuracy | ≤1% of setpoint |
| Efficiency | >90% (at rated output) |
| Cooling | Forced air cooling |
| Operating Temperature | +5°C to +45°C |
| Dimensions (H×W×D) | 88 mm × 440 mm × 480 mm (2U 19″) |
| Net Weight | ~12 kg |
| Input Power Cable | 10A 250V, 3-prong IEC (type C13) |
| Output Cable & Connector | HM-GYX-5KV/1.5mm² with OT4-5 terminal; M/UHF SL16-J-3 |
| Grounding | M6 bolt, 2.5mm² (green/yellow) with RV2-4 terminal |
| Analog Interface | DB25 female, 0–10 VDC (standard) |
| RS-485 Interface | DB9 female, Modbus-RTU (standard) |
| Optional Interface | Profibus DP (DB9, Pin3 A, Pin8 B, Pin5 GND) |
| Interlock | DB25 (Pin2 & Pin5 closed) |
Applications
- Surface cleaning – removes native oxides, hydrocarbons, and other contaminants from substrates
- Enhanced film adhesion – improves bonding strength of thin films
- Defect reduction – minimizes substrate imperfections
- Surface energy increase – promotes wettability and coating uniformity
- Subtexturing / roughening – prepares surfaces for subsequent layers
- DLC (diamond-like carbon) film deposition – ideal for hard coatings
Designed for demanding thin-film processes, this unit delivers precise, repeatable, and arc-free operation. Its digital control platform and real-time monitoring allow seamless integration into vacuum systems and automated production lines. Whether you are cleaning optical substrates, depositing wear-resistant DLC coatings, or activating polymer surfaces, this power supply ensures consistent, high-quality results.
Contact our sales team for customized configurations and volume pricing.