High-Power Linear Ion Source Power Supply for Precision Surface Treatment

Upgrade your thin-film deposition and surface cleaning processes with this 3000W anode layer ion source power supply engineered for superior performance, repeatability, and arc control. Ideal for R&D and industrial production environments.

Features

  •  DSP+FPGA Digital Control – Real-time dynamic tracking with OLED display for instant monitoring of power supply and cathode status.
  •  High Output Accuracy – ≤1% deviation from setpoint, ensuring excellent process repeatability and uniform film layers.
  •  Intelligent Arc Management – Arc detection <0.1 µs, suppression up to 20,000 arcs/s, and arc energy <0.2 mJ/kW – minimizes substrate damage.
  •  Versatile Working Modes – Constant voltage (default constant power), adjustable duty cycle (15–90%), and square wave output (40–80 kHz).
  •  Robust Communication – Standard analog (DB25, 0–10VDC) and RS-485 (Modbus-RTU), with optional Profibus (DB9). Interlock safety included.
  •  Compact & Reliable – 2U 19″ rack-mount, fan-cooled, 12 kg net weight, operates at +5 to +45°C.

Technical Specifications

Parameter Value
Power Rating 3000 W
Input Voltage & Frequency 220VAC ±10% + PE, 50–60 Hz
Output Current (Max) 1000 mA
Output Voltage (Max) 2500 V
Output Frequency 40–80 kHz
Duty Cycle 15–90% (default 50%)
Output Waveform Square wave
Arc Detection Time <0.1 µs
Arc Suppression Capability 20,000 arcs/s
Arc Energy <0.2 mJ/kW
Display 3.1″ OLED (resolution: 1V / 1mA / 1W)
Output Accuracy ≤1% of setpoint
Efficiency >90% (at rated output)
Cooling Forced air cooling
Operating Temperature +5°C to +45°C
Dimensions (H×W×D) 88 mm × 440 mm × 480 mm (2U 19″)
Net Weight ~12 kg
Input Power Cable 10A 250V, 3-prong IEC (type C13)
Output Cable & Connector HM-GYX-5KV/1.5mm² with OT4-5 terminal; M/UHF SL16-J-3
Grounding M6 bolt, 2.5mm² (green/yellow) with RV2-4 terminal
Analog Interface DB25 female, 0–10 VDC (standard)
RS-485 Interface DB9 female, Modbus-RTU (standard)
Optional Interface Profibus DP (DB9, Pin3 A, Pin8 B, Pin5 GND)
Interlock DB25 (Pin2 & Pin5 closed)

Applications

  • Surface cleaning – removes native oxides, hydrocarbons, and other contaminants from substrates
  • Enhanced film adhesion – improves bonding strength of thin films
  • Defect reduction – minimizes substrate imperfections
  • Surface energy increase – promotes wettability and coating uniformity
  • Subtexturing / roughening – prepares surfaces for subsequent layers
  • DLC (diamond-like carbon) film deposition – ideal for hard coatings

Designed for demanding thin-film processes, this unit delivers precise, repeatable, and arc-free operation. Its digital control platform and real-time monitoring allow seamless integration into vacuum systems and automated production lines. Whether you are cleaning optical substrates, depositing wear-resistant DLC coatings, or activating polymer surfaces, this power supply ensures consistent, high-quality results.

Contact our sales team for customized configurations and volume pricing.