CXF-320/3001 Magnetic Levitation Molecular Pump
CXF-320/3001 magnetic suspension molecular pump is a high-performance molecular pump, which adopts advanced magnetic suspension bearing technology to realize non-contact and friction-free operation, thus greatly improving the efficiency and stability of the pump. The invention has compact design and reasonable structure, and can meet the requirements of high vacuum and high cleanliness in the fields of modern semiconductor preparation, chip manufacturing, industrial coating, scientific research equipment and the like.
Main features
High efficiency and energy saving: due to the use of magnetic bearing technology, the friction loss of traditional mechanical bearings is avoided, making the pump more efficient and lower energy consumption.
High cleanliness: magnetic suspension molecular pump will not produce oil pollution in the process of operation, to ensure the cleanliness of the working environment.
Low vibration: The application of magnetic bearing technology makes the pump run with minimal vibration, which is conducive to reducing noise and extending equipment life.
Flexible installation: The compact design of the pump body supports installation at any angle, which is convenient for system integration and layout.
High stability: The magnetic levitation molecular pump has excellent stability and can maintain stable performance during long-term operation.
Technical indicators
Pumping rates: 3200 L/s for N2, 2750 L/s for Ar, 2300 L/s for He, and 1100 L/s for H2.
Limit pressure: up to 10 ^ -7 Pa with rubber seal.
Air inlet flange: DN320 ISO F (standard), other specifications can be customized according to customer's needs.
Rated speed: 21000 RPM.
Start-up time: ≤ 12 min.
Shutdown time: ≤ 26 min.
Cooling method: water cooling.
Recommended pumping speed of backing pump: ≥ 30 L/s.
Weight: 75 kg.
External dimensions: 358 × 337 × 417 mm.
Applications
CXF-320/3001 magnetic levitation molecular pump is widely used in semiconductor, photovoltaic, flat panel display, decorative coating, functional coating, scientific research, new energy, new materials, high-energy physics and other fields. In these fields, high vacuum and high cleanliness are essential for the quality and performance of products, and CXF-320/3001 magnetic levitation molecular pump is the ideal choice to meet these requirements.