Plasma Generator Power Supply for Pulse Plasma Nitriding Unit

Applications
 It can be applied to multi-arc, magnetic control, plasma enhancement, nitridation and chemical vapor deposition, and is mainly used for glow cleaning of workpiece surface, material nitridation, ion bombardment before coating and ion acceleration during deposition.
 Its main circuit topology uses PFC + SiC full-bridge architecture, combined with DSP + FPGA digital control technology.
 It has a built-in arc suppression Arc time setting, matches different processes and substrates, records the number of arcs and counts inquiries.
 It can detect the change of v-Arc & I-Arc, cut off the output quickly, and start the built-in patented technology to eliminate the residual arc energy, avoid the substrate arcing, and ensure the high precision film layer.

Main specifications

Model

BiasBipolar-60100

 Input parameters:

 Input voltage

3x380Vac±10% + PE

 Enter the frequency

47-60Hz

 Power supply power

60KW

 Output parameters:

  

 Working mode

Constant voltage V 1V stepping

 Output current Max

At 100 A duty cycle maximum

 Output voltage Max

-100-800V continuously adjustable

 Output frequency

0-60KHZ (0 DC mode)

 Duty cycle

20-90%

 Ignition voltage Max

≥1000V

 ARC quenching time

<0.3µs

 Arc-suppression DI/DT regulation

5%-95%

 Arc energy

<0.3mJ/kW

 Output mode

DC and single stage pulse

 Output waveform

Square wave

 The panel shows

3.1 inch OLED screen

 Display resolution

1V/1A/1W

 Output accuracy

< ± 0.3%, set value comparison

 Communication interface:

 Analog interface (standard configuration)

DB25 0-10VDC

 RS-485 interface (standard)

Modbus-RTU DB 9 Male Pin1A 2B

 DP communication interface (optional)

ProfiBus DB9 Male Pin3A 8B 5GND

 Interlock interface

DB25 Male (Pin2 and 5 Closed)

 Power supply interface of cooling water solenoid valve

GX-12 2-core male 24VDC

 Other Specifications

 Input cable wiring RVV

≥35mm²

 Output cable wiring

≥ 35mm ² shielded wire withstanding 1 KV

 Grounding

10 mm (green/yellow)

 Cooling water pipe size φ16 mm metric quick coupling

φ16mm (outer diameter) * φ12mm (inner diameter)

 Power supply size mm

7U 19   311Hx440Wx628D

 Net weight

78 kg

 Cooling method

Water cooling + auxiliary air cooling