Our Hybrid PVD Coating System integrates Multi‑Arc Ion Plating and Mid‑Frequency (MF) Magnetron Sputtering in one advanced chamber. This combination delivers outstanding film adhesion, high density, and ultra-smooth surfaces for decorative, functional, and hard coatings on metals, ceramics, glass, and more.
Festures:
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Multi‑Arc Cathodes – High ionization rate (>80%), strong adhesion, ideal for TiN, CrN, ZrN, TiAlN.
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MF Sputtering Cathodes – 40 kHz dual‑target design, eliminates arcing and droplets, produces defect‑free metallic and oxide layers (TiO₂, Al₂O₃, SiO₂).
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Hybrid Mode – Run arc only, sputter only, or co‑deposit to combine hardness and smoothness in one batch.
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Low‑Temperature Process – Suitable for heat‑sensitive substrates.
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PLC + HMI Control – Recipe management, data logging, remote diagnostics.
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Large Chamber Options – Custom sizes from Ø800 mm to Ø1800 mm, planetary rotation for uniform coating (±5%).
Technical Specifications
| Ultimate pressure | <5×10⁻⁴ Pa |
| Arc sources | 4–12 pcs (Φ60–Φ100mm) |
| MF sputtering power | 5–40 kW |
| Bias voltage | Pulsed DC, -100V ~ -500V |
| Heating temperature | up to 450 °C |
| Process gases | Ar, N₂, O₂, C₂H₂ (MFC controlled) |
| Substrate capacity | up to 800 kg |
Applications:
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Cutting tools & molds (TiAlN, AlCrN, DLC)
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Decorative coatings – gold, rose gold, black, blue on watch cases, jewellery, automotive trims
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Stainless steel hardware (phone frames, faucets, door handles)
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Optical & medical components (biocompatible coatings)
Why choose this machine?
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Superior film quality – arc for adhesion + sputtering for smoothness
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Higher productivity – simultaneous processes reduce cycle time
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Green PVD – no toxic chemicals, no waste water
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Global support – installation, training, spare parts, process lab
We offer tailor‑made solutions: chamber size, number of sources, load‑lock system, automatic loading, and more.
For detailed datasheet and quotation, please contact our sales team.