HIPIMS Power Source for Thin Film Vacuum Deposition
Output Power : 20kW
Output Mode : DC output, Pulse output and DC superposed
Pulse output for magnetron sputtering
Operation Interface : Touch Screen Control
DC Mode Output : Constant Current
DC Voltage : ~800V
DC Max. Current : 15A
DC Power : 10kW
Pulse Mode Output : Constant Voltage
Maximum Pulse
Output Voltage : ～0 - 1000V
Pulse Power : 10kW
Maximum Pulse
Peak Current : 400A (adjustable set-point to avoid
overcurrent for various target size)
Pulse Width : ～25μs – 300μs (continuous adjustable)
Pulse Frequency : ～25Hz – 300Hz (continuous adjustable)
Arc Suppression : Equipped
Cooling Mode : Forced Air
Protection : over-voltage, over-current, over-heat
Waveform Output : BNC ports for oscilloscope to real-time
measurement of voltage and discharge current
Input Power : AC 380 V ± 5%, 50 Hz ± 5%, 60A, 3-phase
4-wire systems