Inline Plasma Ashing System

This is an inline system which comes with multiple vacuum chambers. The quanitity of vacuum chambers, magentron cathodes, gas distribution system can be customed according to the processing requirements. A small output system can be made in vertical type and for industrial large scale system can be made in horizontal type.

The system can be used for plasma treatment or with magnetron sputtering/cathodic arc evaporators for thin film deposition applications. Both of turbomolecular pump and diffusion pump options are available.