Magnetron Sputtering Evaporation Coating Machine
Magnetron Sputtering Evaporation Coating Machine combines magnetron sputtering technology and vacuum aluminum evaporation coating(we also call it vacuum metallizing) technology in the same coating equipment, which uses magnetron sputtering cathode glow discharge to sputter target atoms and partially separate and deposit them on the substrate At the same time, the metal plating material can be melted by resistance heating in vacuum and vaporized and deposited on the substrate to form a film. Increase the use and flexibility of the equipment. The equipment can be adapted to a wide range of coating targets, such as: aluminum, copper, titanium, chromium, silver, stainless steel and other metal materials. The equipment has a fast deposition rate, good coating adhesion, fine and dense coating, high surface finish, and good uniformity; this machine realizes fully automated control of the coating process, large loading, reliable film quality, high pass rate, low production cost and this It is a green machine. The equipment is widely used in plastic decoration, gifts, toys, household appliances, auto parts and other industries.
Working principle
The evaporation coating part is a process in which a material is heated to an evaporation state in a vacuum environment, so that atoms or molecules of the material are evaporated and deposited on the surface of a substrate to form a thin film. And in that magnetron sputter coating part, the interaction of a magnetic field and an electric field is utilize to enable electrons to run in a spiral shape near the surface of the target, so that the probability that the electrons collide with argon to generate ions is increase. The generated ions collide with the target surface under the action of the electric field, thereby sputtering out the target material and depositing on the substrate to form a thin film.
Main components
Evaporation magnetron sputtering coating machine is mainly composed of vacuum system, heating system, sputtering system, electrical control system, gas supply system and water cooling system.
Vacuum system: used to ensure the vacuum environment in the coating process, mainly composed of pumping equipment (such as mechanical pump, Roots pump, molecular pump, etc.) and detection equipment (such as resistance gauge, ionization gauge, film gauge, etc.).
Heating system is used for heating the evaporation source to evaporate the coating material. The common heating methods are resistance heating and electron beam heating.
The sputtering system comprises a cathode target, a magnetic field device and the like, and is used for generating a sputtering phenomenon and sputtering target atoms or molecules onto a substrate.
Control system: used to control equipment operation and process parameters, such as voltage, current, power, etc.
Gas supply system: It is used to provide the gas required for coating, such as argon, etc.
Water cooling system: It is used to cool the equipment and prevent the equipment from overheating.
Characteristics
High efficiency: The combination of evaporation coating and magnetron sputtering coating makes the coating rate fast and the efficiency high.
High quality: the coating layer is uniform and compact, with good adhesion and good physical and chemical properties.
Flexibility: Evaporation coating or magnetron sputtering coating, or a combination of both, can be selected to meet the coating needs of different materials.
Controllability: By adjusting the process parameters, such as voltage, current, power, gas type and pressure, the thickness, composition and performance of the coating layer can be accurately controlled.
Applications
Evaporation magnetron sputtering coating machine is widely used in many fields such as optics, electronic information, magnetic materials, solar cells, mechanical processing and so on. For example, it can be used to manufacture optical elements such as lenses and reflectors, electronic information products such as integrated circuits and displays, as well as magnetic thin films and solar panels.