Spare Parts for Endblock of Magnetron Sputter Cathode
Core Components:
Target: This is the most important part of the cathode end head. The target is a circular disk (or rectangular plate, tube, etc.) made of the material to be sputtered and deposited onto the substrate. It is directly exposed to the plasma.
Backing Plate: The target is typically mounted or bonded to a backing plate (especially for brittle, low-thermal-conductivity, or low-strength targets). The backing plate provides mechanical support, a thermal path (to conduct away the heat generated by sputtering), and electrical connections. The backing plate is typically made of a metal with high thermal and electrical conductivity, such as oxygen-free copper or stainless steel. The backing plate can be considered an integral part of the end head structure.
Water Cooling Channels: The cathode end head typically has integrated water cooling channels (usually in the backing plate or cathode body, directly adjacent to the target). The sputtering process generates significant heat, and effective cooling is crucial to prevent the target from melting, deforming, or cracking.
Seal: Vacuum seals (such as O-rings) are located between the target/backing plate and the cathode body (or water-cooling jacket) to ensure the vacuum chamber is airtight and prevent cooling water from leaking into the vacuum chamber. Magnet System: While the magnets themselves are typically mounted inside the cathode body, behind the target, the magnetic field lines they generate cross the target surface, forming a racetrack-shaped region above the target where electrons are trapped. Therefore, the magnet system significantly influences the plasma behavior at the cathode tip.
Design Highlights:
* Target Utilization: The end block features racetrack-shaped grooves, ensuring uniform sputtering of the magnetic field, thereby improving utilization of the expensive target material.
* Excellent Heat Dissipation: The cooling channel design, cooling water flow rate, and thermal contact between the target and the backing plate ensure optimal heat dissipation, preventing overheating.
* Reliable Sealing: The seal design must withstand high vacuum, water pressure, temperature fluctuations, and potential discharge shocks to prevent leakage.
* Electrical Insulation and Safety: The entire cathode assembly is well insulated from the vacuum chamber, ensuring safe and reliable high-voltage connections.
* Contamination Resistance and Cleanability: The end block is easy to clean, reducing sources of particle contamination and ensuring excellent target surface purity for high-quality thin films.
Anti-Sparking/Arcing: The end block incorporates comprehensive edge shielding and optimized magnetic fields to minimize destructive arcing in the end area.