Magnetron Sputtering DLC Coating Machine
| Magnetron Sputtering DLC Coating Machine is designed for applying DLC(Diamond-like Coating) on tools and other applications. The PVD machine also keep the possibility to coat Ti and other nitride coatings, chrome nitride coatings. | |
| Main Specifications: | |
| Vacuum chamber: | Custom made |
| Door | Front open one/two doors |
| Vacuum pumping system: | Magnetic levitated turbopump with N2 purge system +Mechanical pump + Roots pump |
| Plasma Etching system: | MF bias etching power source |
| Coating system: | Cylindrical or rectangular magnetron sputtering systems |
| Carousel: | Rotating carousel for 3 fold rotation |
| Heating: | Up tp 450°C |
| All sealing from temperature stable rubber. | |
| Vacuum level measurement | Pirani + Penning gauge |
| Gas distribution system | 3 flow meters, 0-500 sccm (Ar, N2, C2H2) |
| Controling system | PLC controlling system |
DLC coating process
Pretreatment: pretreat the substrate by cleaning, degreasing and derusting to ensure that the surface of the substrate is clean and free of impurities.
Vacuum pumping: start the vacuum pump system to pump out the gas in the vacuum cavity to reach the vacuum degree required for coating.
A step of sputter coating, in which inert gas such as argon and that like are introduced into a vacuum cavity, and an electric field and a magnetic field are applied. The surface of the target is bombarded by high-energy ions accelerated by an electric field, and the atoms of the target are sputtered out and deposited on the substrate to form the DLC film.
Post-treatment: After the coating is completed, the substrate is cooled, and necessary cleaning and testing are carried out.
Advantages
High hardness and wear resistance: The DLC film has high hardness, which can significantly improve the wear resistance of the substrate.
Low friction coefficient: DLC coating layer has a very low friction coefficient, which can reduce friction and wear and improve the service life of equipment.
Excellent corrosion resistance: DLC film has good corrosion resistance and can resist the corrosion of various chemical substances.
Good adhesion: DLC coatings with good adhesion to the substrate can be obtained by optimizing the coating process and parameters.
Univesal applications: Magnetron sputtering DLC coating equipment is widely used in cutting tools, molds, automotive parts, aerospace and other fields, as well as other occasions requiring high hardness, high wear resistance and low friction coefficient.