Magnetron Sputtering DLC Coating Machine
| Magnetron Sputtering DLC Coating Machine is designed for applying DLC(Diamond-like Coating) on tools and other applications. The PVD machine also keep the possibility to coat Ti and other nitride coatings, chrome nitride coatings. | |
| Main Specifications: | |
| Vacuum chamber: | Custom made |
| Door | Front open one/two doors |
| Vacuum pumping system: | Magnetic levitated turbopump with N2 purge system +Mechanical pump + Roots pump |
| Plasma Etching system: | MF bias etching power source |
| Coating system: | Cylindrical or rectangular magnetron sputtering systems |
| Carousel: | Rotating carousel for 3 fold rotation |
| Heating: | Up tp 450°C |
| All sealing from temperature stable rubber. | |
| Vacuum level measurement | Pirani + Penning gauge |
| Gas distribution system | 3 flow meters, 0-500 sccm (Ar, N2, C2H2) |
| Controling system | PLC controlling system |