CXF-200/1401CVSE Magnetic Levitation Molecular Pump
This pump has the following advantages:
>>> Completely oil-free cleaning: Because the rotor adopts magnetic levitation technology, it realizes non-contact support, completely eliminates lubricating oil vapor pollution caused by mechanical bearings, and can obtain extremely high vacuum (usually up to the order of 10-7 ~ 10-9Pa), meeting applications with extremely high cleanliness requirements.
>>>High pumping speed: The large diameter of 200mm makes it have a high pumping speed and can quickly vacuum the pumped container.
>>>High reliability and long life: Magnetic bearings have no mechanical wear, the life of core components far exceeds that of traditional mechanical bearing molecular pumps, and the average time without failure is extremely long.
>>>Low vibration and low noise: The magnetic levitation support makes the rotor dynamic balance extremely accurate, runs very smoothly, and produces minimal vibration and noise, which is essential for precision instruments (such as electron microscopes).
>>>Intelligent control and monitoring: The built-in controller and communication interface allow real-time monitoring of parameters such as speed, temperature, current, vibration, etc., and can realize remote start and stop, speed regulation and fault diagnosis.
>>>Powerful power-off protection capability: When the magnetic levitation molecular pump encounters an unexpected power outage, it can use stored electric energy or external backup power supply to smoothly reduce the speed of the rotor to a safe position to prevent damage caused by the collision between the high-speed rotor and the protective bearing. This is one of its key safety features.
Applications:
This high-performance molecular pump is the core vacuum acquisition equipment of many high-end equipment and scientific research. It is used in:
① Semiconductor manufacturing: lithography machines, etching machines, PVD/CVD thin film deposition equipment, etc.
② Surface scientific analysis: X-ray photoelectron spectroscopy, scanning electron microscope, transmission electron microscope, etc.
③ Scientific research experimental devices: particle accelerator, synchrotron radiation device, high energy physics experiment, etc.
④ Materials Science: Molecular beam epitaxy equipment for growing new semiconductors, superconducting materials, etc.
⑤ Aerospace: Space environment simulation module.
Parameters:
Drawing:
Pumping Performance:
