Cylindrical Magnetron Sputtering Gun
Name: Customized magnetron sputtering cathode for PVD coating
Type: Rotary sputtering cathodes or planar
Application: For magnetron sputtering deposition
Size: Customized
Cylindrical Mid-Frequency(MF) magnetron sputtering cathode is a specially designed sputtering cathode to produce efficient and uniform film deposition in vacuum sputtering equipment.
The working principle of cylindrical MF magnetron sputtering cathode is based on magnetron sputtering technology. In the sputtering process, the target acts as a cathode and attracts positive ions under the action of an electric field. These positive ions collide with the surface of the target in the process of acceleration, so that the atoms of the target are sputtered out and deposited on the substrate to form a thin film. At the same time, by introducing a magnetic field on the surface of the target, the trajectory of charged particles can be constrained, and the plasma density and sputtering rate can be improved.
Characteristic
Efficient Sputtering: The cylindrical MF magnetron sputtering cathode achieves an efficient sputtering process by optimizing the magnetic field and target design.
Uniform deposition: due to the focusing effect of the magnetic field, the sputtering etching on the surface of the target material is more uniform, thereby improving the deposition uniformity of the film.
Flexible adjustment: By adjusting the position of the magnet device and the mounting seat, the parameters in the sputtering process, such as deposition rate and uniformity, can be easily changed.
Long life: The design of cylindrical MF magnetron sputtering cathode makes it have a long service life, which reduces the frequency and cost of target replacement.
Applications
Cylindrical MF magnetron sputtering cathodes are widely used in various thin film preparation fields, such as solar cells, semiconductor devices, display manufacturing and so on. In these fields, it is necessary to prepare high-quality and uniform films to meet different application requirements.