MF(Medium Frequency) Magnetron Sputtering Plasma Power Source
Medium frequency power supply is suitable for twin target magnetron sputtering, with a wide output frequency (20KHz~120KHz) and output power (20Kw~50Kw), advanced arc management technology and extremely low residual arc energy.
This power supply has mature applications in decorative plating and continuous plating (ITO film, solar cell production, flat panel display, dielectric film, etc.). It is suitable for a variety of processes and applications, and can deposit ultra-thin homogeneous films.
Technical characteristics
Output frequency: The output frequency of intermediate frequency magnetron sputtering power supply is usually 40KHz, which belongs to the intermediate frequency range.
Power range: It has a wide range of power, ranging from 10 KW to 120 KW, which can meet the coating needs of different scales.
Input and output parameters: the input power is AC380V three-phase four-wire system, and the frequency is 50-60Hz ± 10%. The output voltage can reach 1000 V (effective value) at no load, and the output current stability is high, reaching 0.25%.
Cooling mode: According to the power, the medium frequency magnetron sputtering power supply adopts different cooling modes. Air cooling is used when the power is 2-10 KW, and water cooling is used when the power is 10-120 KW.
Operating environment: MF magnetron sputtering power supply is suitable for use in a clean, dust-free, non-corrosive, flammable gas and well-ventilated environment with an ambient temperature of 0-40 ℃ and a relative humidity of ≤ 85%. For water cooling, the cooling water shall be clean and free of minerals and other soluble substances. The water temperature shall be 20-30 ℃ and the pressure shall be 0.15 ± 0.05 Mpa.
Advantages
High efficiency: The medium frequency magnetron sputtering power supply adopts high frequency conversion mode, which improves the sputtering efficiency.
High stability: its output current stability is high, which ensures the stability of the coating process.
High quality: the medium frequency magnetron sputtering power supply can prepare films with high quality and high adhesion.
Environmental protection: Magnetron sputtering technology is a physical vapor deposition technology, which is environmentally friendly and pollution-free.